| 摘要 |
PURPOSE:To enable to surely coat the surfaces of the exposing metals of an electrode wiring pattern with a protective film by a method wherein the pattern width of the upper metal layer is formed narrower than that of the lower metal layer in such a way that the cross sectional shape of the electrode wiring pattern is formed in a stair form at both ends thereof. CONSTITUTION:An electrode wiring is laminatedly formed in such a way that the metal pattern; with a comparatively wider width of a lower metal layer 2a consisting of chrome or molybdeum, which has a characteristic to adhere favorably with a glass substrate 1 and barely produces an intermettalic compound with a permalloy; and the metal pattern; with a comparatively narrower width of an upper metal layer 3a, which has been formed on the lower metal layer 2a and consists of a pure aluminum, an alloy of aluminum and copper or an alloy of aluminum and silicon of a smaller specific resistance; are integrally formed in one body in a stair form at both ends of the cross sectional width direction of the electrode wiring. Moreover, the surfaces of the exposing metals of this electrode wiring are coated with a protective film 4 consisting of a silicon dioxide or a polyimide resin. |
