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发明名称
FORMATION OF THIN FILM
摘要
申请公布号
JPS6025211(A)
申请公布日期
1985.02.08
申请号
JP19830133031
申请日期
1983.07.20
申请人
KONISHIROKU SHASHIN KOGYO KK
发明人
NAOE MASAHIKO;ISHIBASHI SHIYOUZOU
分类号
C23C14/34;G11B5/85;G11B5/851;H01F10/18;H01F10/187;H01F41/18
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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