| 摘要 |
PURPOSE:To enable a wafer holder to be used effectively for conveyance of a wafer by a method wherein a leaf spring enabled to make one edge to be displaced in the perpendicular direction, and transferably semifixed guides are provided to the plane of a base plate. CONSTITUTION:A leaf spring 8 and semifixed guides 11 are fixed on the top surface of a base plate 1 by screws 12 from the back, and a wafer 2 is pressed to be fixed on the base plate 1 according to downward forces of the semifixed guides 11 and the leaf spring 8. Threaded holes 13 of a large number are provided on the base plate, and the semifixed guides 11 are transferred fitting to the shape of the wafer. Elongation of the tip of the leaf spring 8, and to make it correspond to the shape of the wafer is also possible as occasion demands. |
