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发明名称
摘要
申请公布号
JPS616537(B2)
申请公布日期
1986.02.27
申请号
JP19770146302
申请日期
1977.12.05
申请人
MATSUSHITA ELECTRONICS CORP
发明人
TANAKA YOSHIMI;NAKAGAWA SHOICHI
分类号
H01L21/306;H01L21/302
主分类号
H01L21/306
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