| 摘要 |
PURPOSE:To prevent the warping of a substrate in spite of the compressive stress of a thin Co-Cr film and to manufacture a magnetic recording medium with increased wear resistance by forming a thin film of a specified thickness for producing tensile stress on the thin Co-Cr film formed by sputtering. CONSTITUTION:A thin film of 20-300Angstrom thickness for producing tensile stress is formed on a thin Co-Cr film formed by sputtering. Since the Co-Cr film has an islandlike structure, the grains pull each other, producing compressive stress in the film. In order to compensate the stress, said thin film for producing tensile stress is formed by sputtering or other method with alpha-SiN, alpha-TiN or alpha-BN. The thin film produces tensile stress which compensate the compressive stress of the Co-Cr film to prevent the warping of a substrate. The thin amorphous nitride film inhibits effectively the wear of the Co-Cr film. |
