| 摘要 |
PURPOSE:To form efficiently a uniform film on a base body to be formed with the film thereon by providing gas blow-off ports and gas discharge ports near the rotating base body in a way as to face each other thereby reducing the distance of gas flow passages. CONSTITUTION:An inside electrode 31 which is a base body cylinder of a photosensitive body and an outside electrode 32 of a cylindrical shape to be used as a deposition vessel are concentrically disposed. A gas blow-off pipe 42 having plural pieces of blow-off ports 34 and a gas discharge pipe 43 having plural pieces of discharge ports 35 are provided apart a prescribed space on the outside circumference of the electrode 32. Electric current is impressed between both electrodes 31 and 32 while the electrode 31 is rotated and a gaseous raw material is blown off from the ports 34, is made into plasma by high frequency discharge and is directed in the form of gaseous flow 37 toward the surface of the electrode 31, thereby forming a film on the surface thereof. The excess gaseous plasma is thereafter discharged immediately through the ports 35. The uniform and stable gaseous flow 37 is thus obtd. |
