| 摘要 |
PURPOSE:To obtain the lead frame having no precipitation of alloy layer at the interface of Al/Fe-Ni alloy by a method wherein the vapor of Al or Al alloy ionized by an inactive plasma excited at high frequency is deposited on the surface of a filament of Fe-Ni alloy at a substrate temperature of 150-350 deg.C and a substrate voltage of -2.5--3.0kV. CONSTITUTION:When an Al or Al alloy layer is deposited on the filament of Fe-Ni alloy, the relation between the followings in the case of the substrate temperature of T deg.C and the substrate voltage of -EkV, is prescribed within a range of 100<=TE<=600. That is, a vacuum container 2 having an exhaust port 1 is provided therein with a substrate holder 3, a high frequency electrode 4, a hearth of vapor evaporation source 5, an electron gun 6 positioned close to the hearth, and a heater 7 consisting of an infrared ray lamp positioned behind the hearth. Next, a substrate 8 of Fe-Ni alloy is installed to a holder 3 on the side of the hearth 5, and the Al or Al alloy is contained in the hearth 5, and vapor deposition of ionization is performed in a pressure-reduced Ar gas. At this time, the substrate temperature and the impressed voltage are specified as mentioned above. |
