| 摘要 |
Apparatus for ensuring laminar flow through the main (non-measuring) branch of a split flow path flowmeter comprising a mass flow controller made of juxtaposed annular plates having interconnecting radial slots. The resulting flow passageways have proper length-to-hydraulic radius ratios to ensure that flow therethrough is laminar. A relatively inexpensive manufacturing technique is utilized to produce the annular plates whereby the radial slots are etched completely through each plate rather than being chemically etched or machined into only part of the thickness of each plate or bored through part of the interior of each plate.
|
