SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF

摘要

A semiconductor device comprises a wave guide which permits propagation of light in the range of wavelengths between 0.9 and 1.6 mu m. This wave guide is formed on a crystallographic oriented substrate of monocrystalline semiconductor material from the group III-V covered with a layer of a dielectric material. Grooves are etched in the dielectric material according to the configuration chosen for the wave guide, and correspondingly into the substrate. The wave guide is obtained by anisotropic epitaxial growth of the III-V semiconductor material from the substrate in these grooves, and is bounded on its lateral and upper parts by crystallographic faces having a specific orientation relative to the plane of the substrate surface. The attenuation obtained for such wave guides is of the order of 1 dB/cm for light having a wavelength of 1.06 mu m.