| 摘要 |
PURPOSE:To attain prevention of deterioration in degree of vacuum in the device and to maintain stably a prescribed high vacuum by providing a non-evaporating active getter section without losing the function of an atomic beam generating furnace to important points in the said furnace. CONSTITUTION:The construction is designed that the non-evaporating active getter member 35 is fitted to an inner wall of a vapor generating section 33. In the process where the inside of the atomic beam device is evacuated into a high vacuum while the inside of the atomic beam device is baked at a temperature of 400-500 deg.C, when the getter member 35 is degassed and activated, impurity residual gas in the atomic beam generating furnace is absorbed by the getter member 35 and the inside is maintained at a prescribed high vacuum. |
