| 发明名称 |
OPTICAL DEVICE AND MANUFACTURE OF THE SAME |
| 摘要 |
Disclosed is a device including a surface coating for passivation or anti-reflection, and a method of manufacture. The coating comprises ZrO2 doped with yttrium, magnesium or calcium. The doped ZrO2 is preferably deposited on the device surface by electron-beam evaporation from a single crystal source of ZrO2 and Y2O3, MgO or CaO. |
| 申请公布号 |
JPS62144388(A) |
申请公布日期 |
1987.06.27 |
| 申请号 |
JP19860291693 |
申请日期 |
1986.12.09 |
| 申请人 |
AMERICAN TELEPH & TELEGR CO <ATT> |
发明人 |
UTOPARU KUMAA CHIYAKURABAATEI;ARANDO KUWAN YUU CHIN;JIYOOJI JIYON PURUZUIBAIRETSUKU;REGURANDO JIERARUDO BUAN UITAATO;JIYOOJI JIYON ZUIDOZUITSUKU |
| 分类号 |
H01L31/0264;C23C14/08;C23C14/30;G02B1/11;H01L21/314;H01L21/316;H01L31/04;H01L33/00;H01S5/00;H01S5/028 |
主分类号 |
H01L31/0264 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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