发明名称 SUBSTRATE TREATED TO FORM SINGLE CRYSTAL ON SURFACE AND PREPARATION THEREOF
摘要 PURPOSE:To prepare inexpensively a substrate treated to form single crystals of uniform quality on the surface by forming plural numbers of island parts separately to each other on the surface of a molded body of powdery starting material which is to form duplex structure by calcination, then calcining the substrate by normal calcination. CONSTITUTION:A molded body having a specified shape which will have a duplex structure of a desired density when it is calcined normally at a specified temp. is prepd. by molding powdery starting material such as alumina in a mold. Then, the molded body is calcined preliminarily at lower temp. than the normal calcination temp. by 50-500 deg.C, and grooves 3 are then formed with a diamond cutter, etc. on the surface of the molded body to form plural numbers of island parts 2 separated to each other. The molded body is then calcined normally at specified temp. to obtain a substrate comprising a surface side comprising single crystals formed completely to one giantic crystal as a whole from each island part, and a rear surface side consisting of polycrystalline part 1 of the starting material powder.
申请公布号 JPS6021892(A) 申请公布日期 1985.02.04
申请号 JP19830129180 申请日期 1983.07.14
申请人 MATSUSHITA DENKI SANGYO KK 发明人 HIROTA TAKESHI;INOUE OSAMU;NISHIMURA HIROHARU;MIHARA TOSHIHIRO;NITSUTA KOUJI
分类号 C30B1/02;H01L21/20;H01L21/86 主分类号 C30B1/02
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