| 摘要 |
PURPOSE:To allow adhesion of all bodies to be abraded to the specific surface plate side when an upper surface plate is lifted to form a space after the completion of abrasion by using abrasive clothes having different adhesiveness to the abrasion surface, and stretched over the upper and lower surface plates. CONSTITUTION:A polyester non-woven fabric impregnated with polyurethane, for example, is used as the abrasive cloth 3a stretched over the lower surface of an upper surface plate 1, and a polyurethane non-woven fabric is used as the abrasive cloth 4a stretched over the upper surface of a lower surface plate 2. The adhesiveness of wafers 5a, 5b, etc. to the lower abrasive cloth 4a is larger than to the upper abrasive cloth 3a when the abrasion is completed, thereby, when the upper surface plate 1 is moved upward to form a space, all wafers 5a, 5b, etc. are stuck and left to the abrasive cloth 4a, thus the take-out work with a pair of pincets is stabilized and the work efficiency can be improved. |
