| 摘要 |
PURPOSE:To stabilize the oscillated output of a laser device regardless of the magnitude of the discharge power at the time of gas excitation, by arranging one-end side of supporting rods, which support reflecting mirror on the upstream side of a gas flow path, which is intersected with the axial direction of the laser light at a right angle. CONSTITUTION:A pair of reflecting mirrors, which forms a resonator, is supported by a plurality of supporting rods 21a-21d so that the mirrors face to each other at separated positions. One-end side of the rods are arranged on the upstream side of a gas flow path 6, which is arranged in an approximately perpendicular state with the axial direction L of laser light. The other-end side of the supporting rods 12a-21d are arranged at the downstream side of the gas flow path 6. The rods 21a-21d are arranged in the intersecting state. When a large difference in gas temperature is yielded between the upstream side and the downstream of a discharge part in the gas flow path 6 due to the discharge in gas excitation, the difference in wall surface temperature of a gas circulating wind tunnel is yielded between the upstream side and the downstream side of the discharge part 11. At this time, the supporting rods can be thermally expanded uniformly, and the laser oscillating output and the oscillating mode can be stably maintained. |
