| 摘要 |
A method is disclosed of manufacturing an optical stripline waveguide for use in non-reciprocal optical components, in which a monocrystalline waveguide strip having a refractive index n2, which is surrounded by material with a lower refractive index n1, is provided on a monocrystalline substrate, the waveguide strip and the material surrounding it being deposited on a substrate by means of RF cathode sputtering (sputter epitaxy) in an inert gas plasma, making use of a target which contains mainly iron garnet phase, together with other phases with an almost equal sputtering rate, the crystal lattice of said substrate being locally disturbed in the surface regions where no waveguide strip is to be grown, thereby forming a lattice disorder. |
