发明名称 |
PROCESS FOR MAKING AMORPHOUS SEMICONDUCTOR SUBSTANCES ON A SUBSTRATE |
摘要 |
<p>A process for depositing semiconductor alloy films on a substrate by supplying microwave energy to a first gaseous mixture held at subatmospheric pressure in a reaction vessel to establish a glow discharge in the mixture, characterized in supplying microwave energy to a second gaseous mixture remote from the substrate to form free radicals, conveying the free radicals to the vicinity of the substrate and incorporating the free radicals in the film.</p> |
申请公布号 |
IN161892(B) |
申请公布日期 |
1988.02.20 |
申请号 |
IN1169CA1983 |
申请日期 |
1983.09.24 |
申请人 |
ENERGY CONVERSION DEVICES, INC. |
发明人 |
OVSHINSKY STANFORD ROBERT;ALFRED DAVID DEAN;WALTER LEE;HUDGENS STEPHEN JENKINS |
分类号 |
C23C16/30;C23C16/50;C23C16/511;H01J37/32;H01L21/205;H01L31/04;(IPC1-7):H01L7/00;H01L15/00 |
主分类号 |
C23C16/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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