| 摘要 |
PURPOSE:To manufacture efficiently high-precision coils by a method wherein a conductive material is stuffed in the grooves to be formed in the insulating layer and the coils are formed by performing an ion milling, and at the same time, the surfaces of the coils are flattened. CONSTITUTION:An insulating layer 11, which is thicker the coils and is made of SiO2 and so forth, is formed on a non-magnetic substrate A by the prescribed thin film forming technique. Grooves 3 in the prescribed pattern are formed in the insulating layer 11 by performing a dry etching using resist films 12 as masks. Then, a conductive material, of which the coils are constituted, such as a copper conductive layer 14, is formed on the insulating layer 11, wherein the grooves 13 are formed, using a thin film forming technique, such as an electroless plating method or a physical paper deposition method. Moreover, a resist material having a high viscosity is applied by a means, such as a spin- coating method, and a flattened layer 15 having a nearly flattened surface is formed on the conductive layer 14. After that, the flattened layer 15 and part of the conductive layer 14 are etched by an ion milling, coils 16 are constituted, and at the same time, the surfaces thereof are respectively formed flat.
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