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发明名称
GRAFT POLYMERIZED SIO2 LITHOGRAPHIC MASKS
摘要
申请公布号
IL73212(D0)
申请公布日期
1985.01.31
申请号
IL19840073212
申请日期
1984.10.09
申请人
HUGHES AIRCRAFT COMPANY
发明人
分类号
H01L21/027;G03F7/26;G03F7/36;G03F7/38;H01L21/30;(IPC1-7):G03C/
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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