| 摘要 |
PURPOSE:To simplify the changing operation of diameters of wafers for automation by constructing a jig to hold wafers at different heights in accordance with their diameters for rising and falling at a fixed position as the kind of the diameter of the wafer is designated. CONSTITUTION:A wafer 9 conveyed by a conveyor belt 11 is transferred to a conveyor belt 11a, and stopped by the blockage of a guide/pusher 12' stopped at the position of a member on the right side of a guide/pusher 12. Then, guide/ pushers 12, 12', and 12'' are brought down to a lower limit sensor 7, successively moved to the left, and returned to the original point. Guide/pushers 12-12'' are brought up to the operational position of the first upper limit sensor 17, and the guide/pusher 12 supports the wafer 9 at a corresponding stage to a fixed diameter and moves to the right until a left-side member comes to 12'' in the figure. Subsequently, the pusher 12 is returned to the original point. Meanwhile, the wafer 9 is supported on a belt 11a, and processed at a processing position on the right side of the pusher. In this construction, wafers of different diameters are supported in their respective positions, and diameters can be changed automatically. |
