| 摘要 |
PURPOSE:To realize high accuracy positioning of a stage and obtain a large controllable range without changing a performance of gas bearing guides by controlling fine displacement members provided to fluid supplying pads themselves or between the pads and sliders. CONSTITUTION:A Y-direction slider 2 is provided to a fixed Y-direction guide 1. X-direction movement of a stage is bound by gas supplying pads 5A, 5B and Z- direction movement is bound by gas supplying pads 5C, 5D and the stage is floated against the guide 1. Respective fine displacement members 5a, 5b are provided between the slider 2 and the pads 5A, 5B. An X-direction guide 3, an X-direction slider 4, gas supplying pads 6A1-6D, a driving motor 8 and the like are provided on the slider 2 and respective fine displacement members 6a1-6b2 are provided between the guide 3 and the gas supplying pads 6A1-6B2. High accuracy positioning of the X-Y-theta stage is realized by displacing facing members 5a, 5b, 6a1-6b2 to the same extent and opposite directions. |
