Silicon-based capacitive transducers incorporating silicon dioxide electret

摘要

In capacitive electroacoustic or acoustoelectrical transducers, silicon and/or silicon dioxide are/is used as oscillatory plate or membrane. The electrical field between the electrodes of capacitive electromechanical, mechanoelectrical, electroacoustical or acoustoelectrical transducers is produced by means of a statically charged silicon dioxide layer. The silicon dioxide layer may be situated either on the stationary counterelectrode or on the membrane.