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发明名称
FORMATION OF METAL OXIDE MASKS, ESPECIALLY BY REACTIVE ION ETCHING
摘要
申请公布号
EP0056845(B1)
申请公布日期
1985.01.30
申请号
EP19810108438
申请日期
1981.10.16
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
MATHUNI, JOSEF, DR. DIPL.-PHYS.;UNGER GEB. LEE, KARIN
分类号
H01L21/302;G03F7/09;G03F7/40;H01L21/033;H01L21/3065;(IPC1-7):H01L21/00
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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