| 摘要 |
PURPOSE:To attain measurment of the floating characteristics of a slider, an infinitesimal floating amount, the floating amount of a parallel floating slider and the floating amount of a slider having an air bearing part of a complicated form respectively, by attaching a light transmissible plate member to the slider. CONSTITUTION:When light Iphi of a light source is made incident on a slider 2, the incident light Iphi is reflected from the lower sides of glass plates 4a and 4b respectively to produce reflected light I1. At the same time, the light Iphi is reflected from the upper surface side of a disk 5 to produce reflected light I2. Gaps between the disk 5 and aplates 4a and 4b are measured from the interference fringes generated from both beams I1 and I2. While the floating amount (h) of the slider 2 is obtained by measuring the height of the surface sides of a slider air bearing part 3 and the height hsft of plates 4a and 4b and subtracting these heights from each other. Then the floating amount of the slider 2 can be measured from the combination of a real disk and a real slider. While a microminiature floating amount of the slider 2 can be measured by setting the height hsft of the plates 4a and 4b at >=0.2mum. |
