摘要 |
PURPOSE:To stabilize the laser output by cooling a cathode and thus prolonging its lifetime by a method wherein the cathode is brought into contact in a heat transfer manner with a dielectric electrode constructed to be cooled. CONSTITUTION:The surface of a metal 17 in the dielectric electrode 16 of the titled device is covered with a dielectric 18, and the inside of the electrode 16 is cooled with cooling water 20. Cathode pins 2 are arranged in contact with the surface of this electrode 16 and then effectively cooled with the water 20 along with the electrode 16. Silent discharge 8 is generated between this pin 2 and the surface of the dielectric 18, and glow discharge 6 pre-exciting a laser medium 9 in the periphery of the pin 2 is diffused. Finally, the cooling of the pin 2 with the water 20 along with the electrode 16 causes the prolongation of its lifetime and then the stability of the laser output. |