发明名称 D'ARIA TRA LE CONNESSIONI TRANSISTORE MESFET CON STRATO DELL'ELETTRODO DI GATE AL SUPPORTO E RELATIVO PROCEDIMENTO DIFABBRICAZIONE.
摘要 In the new structure of the Schottky barrier field effect MESFET transistor, consisting of a substrate and three electrodes (source, gate and drain), the electrical resistance of the gate is practically zeroed by using an electrode having the shape of a continuous sheet which bypasses a portion of source and created an air layer between its connections. The fabrication process basically includes a first photomasking, evaporation of the metallization layer on photoresist material, growing, a second photomasking and etching of total metallization and removal of the two photoresists.
申请公布号 IT8519262(D0) 申请公布日期 1985.01.28
申请号 IT19850019262 申请日期 1985.01.28
申请人 TELETTRA - TELEFONIA ELETTRONICA E RADIO S.P.A. 发明人 GIAMPIERO DONZELLI
分类号 H01L29/80;H01L21/027;H01L21/285;H01L21/338;H01L21/38;H01L23/48;H01L23/482;H01L29/41;H01L29/423;H01L29/47;H01L29/812;(IPC1-7):H01L/ 主分类号 H01L29/80
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