ELECTRON BEAM EXPOSURE DEVICE,申请号JP19880304170-传众专利搜索

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发明名称	ELECTRON BEAM EXPOSURE DEVICE
摘要
申请公布号	JPH02151016(A)	申请公布日期	1990.06.11
申请号	JP19880304170	申请日期	1988.12.02
申请人	MITSUBISHI ELECTRIC CORP	发明人	FURUKAWA TETSUYOSHI
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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