发明名称 MEASURING DEVICE OF ILLUMINANCE DISTRIBUTION OF SLIT LIGHT
摘要 PURPOSE:To reduce the number of illuminance measuring elements and correcting circuits by providing a detecting means consisting of thermosensor which measures the temperature of an illuminance measuring element, a means which moves this detecting means, and a means which corrects an illuminance signal with the output signal of the thermosensor. CONSTITUTION:A control system 100 consists of a control part 11, a motor control circuit 12, and a motor driver 13. The motor control circuit gives a command from the control part 11 to the motor driver 13, and the motor driver 13 drives a DC motor 21. A mechanical system 200 consists of the DC motor 21 which slides an illuminance measuring element 3 along a slit light, a photosensor 23 which detects the rotation number of this motor 21, photosensors 24 and 25 for limit detection, and a thermosensor 22. Photosensors 24 and 25 detect limit points of extents of movement of the illuminance measuring element 3 and the thermosensor 22. A correcting circuit 4 uses the output signal of the thermosensor 22, which indicates the temperature of the element 3, to correct the illuminance signal outputted from the element 3.
申请公布号 JPS6014131(A) 申请公布日期 1985.01.24
申请号 JP19830121628 申请日期 1983.07.06
申请人 HITACHI SEISAKUSHO KK 发明人 WATANABE ETSUROU;INAGAKI AKIRA
分类号 G01J1/42;H01L21/027;H01L21/30;(IPC1-7):G01J1/44 主分类号 G01J1/42
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