| 摘要 |
PURPOSE:To make it possible to remove dirt attached to a window thermally, by providing an infrared-ray transmitting heater on one surface of an infrared-ray transmitting substrate, and providing an infrared-ray transmitting temperature- sensitive resistor on the other surface. CONSTITUTION:On one surface of an infrared-ray transmitting substrate 5, an infrared-ray transmitting heater 7 constituted of an SiC film is formed by a sputtering method, and electrode film 8 for the heater is formed. Then, on the other surface of the substrate 5, an infrared-ray transmitting sensitive resistor 9 constituted of an SiC film is formed. An electrode film 10 for the resistor, which is connected to the resistor 9, is formed. When dirt such as organic materials is attached to the infrared-ray transmitting window constituted in this way, the dirt can be removed by applying power to the SiC heater 7. |
