| 摘要 |
PURPOSE:To remove dirt thermally, by forming an infrared-ray transmitting heater on the surface of an infrared-ray transmitting plate, which is sealed to one open end of a cylindrical metal container having two open ends in an airtight manner. CONSTITUTION:Si is used for an infrared-ray transmitting plate 5. an SiC film is formed on one surface of the plate 5 by a sputtering method, and an infrared-ray transmitting heater 7 is formed. The Si infrared-ray transmitting plate 5 formed in this way is sealed to the open end of a cylindrical metal container 6 by an airtight manner. Meanwhile, a detecting element 1 is connected to a supporting table 2. The detecting element 1 and external lead wires 4 are connected by internal lead wires 3. Thereafter, the supporting table 2 and the cylindrical metal container 6 are sealed. Since the detecting element 1 is sealed by the airtight manner, it is protected from the external environment. Dirt such as organic materials, which is attached to the transmitting plate 5, can be burned and removed by applying power to the SiC heating film 7 through an electrode film 8. |
