发明名称 Method and apparatus for controlling alignment and brightness of an electron beam.
摘要 <p>An electron beam (12) is aligned with the center of an aperture (14) in a plate (16) in the path of the beam by cyclically scanning (34,38,30) the beam across the aperture through equal distances on opposite sides of an initial beam location, measuring (48-62) the beam current that flows through the aperture when the beam is on opposite sides of the initial location, which opposite sides correspond to adjacent half cycles of the scan, determining the difference in beam currents flowing in adjacent half cycles, and deflecting (34,38, 30) the beam in a direction toward the center of the aperture until there is reached a condition wherein the different in currents is zero, which condition indicates that the beam is aligned with the center of the aperture. The currents may be measured by converting them (48, 50) to signals having a frequency proportional to the current, counting (54-62) the signal cycles during each half cycle, and then subtracting (3) the count for one half cycle from that of an adjacent half cycle. The amplitude of the scan is large enough such that the beam strikes the opposite edges of the aperture at the extreme limits of each scan. The scan frequency is preferably that of the power line frequency to eliminate noise problems. The total current flowing through the aperture during a complete scan cycle is also sensed (73) and used to regulate the brightness of the electron beam.</p>
申请公布号 EP0131699(A1) 申请公布日期 1985.01.23
申请号 EP19840104924 申请日期 1984.05.03
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 DORAN, SAMUEL K.;HAIRE, DONALD F.;TROTTER, RALPH R.
分类号 H01L21/027;H01J37/304;H01J37/305;(IPC1-7):H01J21/26;H01J37/153 主分类号 H01L21/027
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