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经营范围
发明名称
PLASMA REACTOR VESSEL
摘要
申请公布号
GB8431422(D0)
申请公布日期
1985.01.23
申请号
GB19840031422
申请日期
1984.12.13
申请人
STANDARD TELEPHONES & CABLES PLC
发明人
分类号
H01L21/302;C23C16/50;C23C16/515;C23F4/00;H01J37/32;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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