| 摘要 |
PURPOSE:To improve sealing property and durability and also realize connection through allowing rotary, reciprocating and eccentric operation by providing sealing means on the inner and outer peripheral ends of a diaphragm. CONSTITUTION:Seals 3, 45 are provided on the inner and the outer peripheral ends of a diaphragm 4. A hollow shaft 5 can make a reciprocating motion while holding pressured fluid in a case within an allowable range of the diaphragm 4 in the axial direction. Eccentric motion and rotary displacement are possible due to flexibility of the diaphragm 4. Since rotation of the seal 3 and the outer peripheral face of the hollow shaft is allowed, loosened relative rotary motion of said shaft 5 and the case is possible. In case the diaphragm 4 is formed by a metal plate, reciprocating motion in the axial direction can be made and also an accelerated relative rotary motion of the hollow shaft 5 and the case 7 is allowed. |
