发明名称 Method for manufacturing metallized semiconductor components
摘要 A method for the manufacture of metallized semiconductor components, particularly power semiconductor components such as thyristors in which the semiconductor substrate is covered with at least three metal layers including a base layer attached to the substrate, an intermediate layer, and an upper layer upon which the various photoresist compositions are located to define the electrode structures, the intermediate layer being composed of a metal which has different solubility characteristics than either the upper or lower metal layers so that the various layers can be selectively etched by means of suitable solvents.
申请公布号 US4495026(A) 申请公布日期 1985.01.22
申请号 US19830523574 申请日期 1983.08.16
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 HERBERG, HELMUT
分类号 H01L29/73;H01L21/28;H01L21/283;H01L21/306;H01L21/331;H01L23/482;H01L29/41;H01L29/45;H01L29/74;(IPC1-7):C23F1/02;B44C1/22;C03C15/00;C03C25/06 主分类号 H01L29/73
代理机构 代理人
主权项
地址