KATHODENZERSTAEUBUNGSEINRICHTUNG MIT EINER VORRICHTUNG ZUR MESSUNG EINES KRITISCHEN TARGET-ABTRAGES.

摘要

A cathode sputtering device for coating the surfaces of components in a vacuum chamber, which contains a noble gas, includes a target electrode and an anode. A magnetic field is concentrated on the cathode in order to intesify the plasma discharge. A probe is located in the chamber to measure the critical target discharge. The probe pref. contains a gas whose drop in pressure makes the critical target discharge.