发明名称 |
STROBE ELECTRON BEAM DEVICE |
摘要 |
PURPOSE:To enable to observe the internal voltage waveform of a sample even if the time stability of a clock pulse is insufficient except an accurate delay unit by providing an arbitrary clock pulse in a repetition period of the observing time origin. CONSTITUTION:An electron optical barrel 1 emits an electron beam to the observing point of a sample 3 placed in a sample chamber 2. The production of an electron beam is controlled by a pulse driver 6. A pulse generator 7 responses to signals on lines 8-11. The counted output of a counter 20 is connected to one input of a comparator 21, and the set output of a register 22 is connected to the other input. The output of the comparator 21 is connected to a variable delay unit 23. A control counter 14 outputs a clock pulse number designation signal and a time designation signal. The output of the secondary electron detector 13 is connected through a signal processor 16 for addition-averaging it to the counter 14. An electron beam emitting timing pulse is supplied through a line 17 from the generator 7. |
申请公布号 |
JPS6010636(A) |
申请公布日期 |
1985.01.19 |
申请号 |
JP19830119047 |
申请日期 |
1983.06.30 |
申请人 |
FUJITSU KK |
发明人 |
GOTOU YOSHIAKI;OZAKI KAZUYUKI;ISHIZUKA TOSHIHIRO;ITOU AKIO;FURUKAWA YASUO |
分类号 |
H01J37/26;G01R31/302;H01L21/66;(IPC1-7):H01L21/66 |
主分类号 |
H01J37/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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