INFRARED LAMP ANNEALER

摘要

PURPOSE:To heat wafers uniformly by providing a heat resistant cylindrical thin plate which is to be a secondary light source between infrared lamps and a quartz container in which semiconductor wafers are contained. CONSTITUTION:An infrared lamp annealer is composed of a quartz container 12, infrared lamps 14, reflective mirrors 15 which reflect lights from the lamps 14 into the container 12 and a cylindrical heat resistant thin plate which is made of a stainless steel thin plate and which is surrounding the quartz container 12. A large number of semiconductor wafers 13 are held vertically on a holding table and contained in the container 12. The lights from the lamps 14 are applied to the thin plate 23 and the thin plate heats the wafers 13 as the secondary light source so that the wafers 13 are heated uniformly.