发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To improve characteristics and yield according to bipolar logic by regulating the width W1 of a projecting section formed to the side surface of an N<+> type buried diffusion region or the width W2 of a notch section and the width We and length le of a P<+> type emitter region. CONSTITUTION:An N<+> type buried diffusion region N<+>b region 2 with a projecting section 8 having predetermined width W1 and length l1 is formed to one side surface (a), and a P<+> type emitter region 5 having prescribed width We and predetermined length le crossing the projecting section 8 in the N<+>b region 2 in a manner such as a rectangular manner is disposed to the upper section of the projecting section 8 in the N<+>b region 2 through an N type base layer 4 in prescribed width Wb. The width W1 of the projecting section 2 of the N<+>b region 2 and the width We and length le of the emitter region 5 are each prescribed to size corresponding to desired hFE on the basis of a preliminary experimentation. The length l1 of the projecting section 8 of the N<+>b region is prescribed to length obtained by summing the width We of the emitter region 5 crossing with the projecting section 8 and length l2, l3 corresponding to the absorption of errors on a mask alignment leaving on both sides of the region 5. The emitter region 5 is further prescribed to length or longer acquired by adding errors l4, l5 on the mask alignment to the width W1 of the projecting section 8 of the N<+>b region.
申请公布号 JPS6010777(A) 申请公布日期 1985.01.19
申请号 JP19830119272 申请日期 1983.06.30
申请人 FUJITSU KK 发明人 KUMAGAI MASAO;ENOMOTO HIROSHI;TAWARA AKINORI;YASUDA YASUSHI
分类号 H01L21/74;H01L21/331;H01L29/72;H01L29/73;(IPC1-7):H01L29/72 主分类号 H01L21/74
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