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发明名称
摘要
申请公布号
JPH0465145(B2)
申请公布日期
1992.10.19
申请号
JP19860069336
申请日期
1986.03.26
申请人
SHARP KK
发明人
FUJII YOSHIHISA;SUZUKI AKIRA;HATANO AKITSUGU;YOSHIDA MASARU
分类号
B01J19/00;C23C14/06;C23C14/34;C23C16/32;C23C16/50;C30B29/36;H01L21/205
主分类号
B01J19/00
代理机构
代理人
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地址
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