摘要 |
PURPOSE:To prevent deterioration of display quality due to reflected light from side surfaces of spacers, by forming, at the same time as the electrodes are formed, shielding masks for shielding gas discharge light reflected from side surfaces of the spacers on the substrate on the display side at the positions to oppose the spacers. CONSTITUTION:On each surface of a pair of glass substrate 3, 4 is formed an electrode material film of chrome-copper-chrome three-layer structure by, for example, a sputtering method or evaporation method. The films are then subjected to a patterning process by photolithography and given predetermined patterns, and thus pluralities of X electrodes 5 and Y electrodes 6 are formed on respective surfaces. At the same time, shielding masks 10 are also formed by patterning with the same electrode material on the surface of the glass substrate 3 on the display side at the positions opposing the spacers, wherein the shielding mask 10 has a larger area than the area to be occupied by the spacer 9. Thereafter, dielectric layers 7 and sealing material layers 8 are formed in succession and the spacers 9 are disposed. And then the substrates 1, 2 are sealed up in a predetermined sealing process. |