| 摘要 |
<p>PURPOSE:To examine automatically a wire loop shape by attaining deviations of wire positions in plane and side images from reference wire positions after positioning a wire in accordance with the plane image. CONSTITUTION:A rotary stage is rotated at an angle to move a wire 46 to be examined to such image pickup position that the wire 46 is vertical to a TV camera. A deviation DELTAd between the wire 46 to be examined and a reference wire position 51 is attained on a basis of a wire image (plane image) signal picked up by a TV camera A3 and is compared with a standard value to detect disconnection and mutual approximation or wires. A deviation DELTAn between the wire 46 to be examined and a reference wire position 52 is attained on a basis of a wire image (side image) signal picked up by a TV camera B7 and is compared with a standard value to detect defects such as a sag of the wire, contacting with another object such as an IC chip 44, a package 41, etc. or the like.</p> |
