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发明名称
SPRAY ETCHING METHOD
摘要
申请公布号
JPS608100(A)
申请公布日期
1985.01.16
申请号
JP19830116497
申请日期
1983.06.28
申请人
ASAHI KASEI KOGYO KK
发明人
KOBAYASHI HIROSHI;NAKAMURA SHIYOUHEI
分类号
B05D1/32;B24C1/04;B44C1/22;G03F7/12;(IPC1-7):B44C1/22
主分类号
B05D1/32
代理机构
代理人
主权项
地址
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