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发明名称
CONNECTION FOR MEASURING OF CONSOLIDATE TIME OF DEFLECTED ELECTRON-BEAM IN ELECTRONLITHOGRAPH
摘要
申请公布号
CS232227(B1)
申请公布日期
1985.01.16
申请号
CS19830000048
申请日期
1983.01.05
申请人
DELONG,ARMIN,CS;KOLARIK,VLADIMIR,CS;PAPIREK,TOMAS,CS;VASINA,PETR,CS
发明人
DELONG,ARMIN,CS;KOLARIK,VLADIMIR,CS;PAPIREK,TOMAS,CS;VASINA,PETR,CS
分类号
G01R29/00;(IPC1-7):G01R29/00
主分类号
G01R29/00
代理机构
代理人
主权项
地址
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