| 摘要 |
PURPOSE:To enhance the cooling effect and to reduce the cost of the plasma capillary by a method wherein when the axis of the laser beam of the rare gas is surounded with the cylindrical structure comprising a radiation fin, this structure is composed of the laminated body of the disc-shaped insulator having a small hole in the center and the metallic plate having a larger hole than the above one and the elctrical isolation and the air tightness for vacuum are maintained mutually with adjusting the centers of the holes so as to be in accordance. CONSTITUTION:The vacuum enclosure 6 provided with a Brewster's window 4 at the outside end and enclosing a cathode 1 and the rare gas 7 in the inside of it and the vacuum enclosure 6' similarly provided with a Brewster's window 4' at the outside end and an annular anode 3 at the inside end are placed oppositely to each other and these are connected by the gas return path 5. Next, a plasma capillary is arranged between the enclosures 6 and 6' through the enclosure trays 9 and 9' respectively. At this time, this capillary is composed of the laminate of the cylindrical insulator 12 having a small hole in the center and the large-diameter metallic plate 14 for heat dissipation which has a hole larger than of said insulator 12, and the centers of the holes are made to be in accordance with the optical axis 8 of the laser. |
