| 摘要 |
PURPOSE:To obtain the plasma capillary with high cooling efficiency by a method wherein when the laser beam axis of a rare gas ion laser tube is surrounded by the cylindrical structure having a radiation fin, this structure is composed of the laminate of the cylindrical insulators and the metallic plates which are provided with the small holes arranged in the centers along the optical axis and also a plurality of small holes on the periphery which communicate with one another, and which are used for the return path of the gas. CONSTITUTION:The vacuum enclosure 6 provided with a Brewster's a window 4 at the outside end and enclosing a cathode 1 and the rare gas 7 in the inside of it and the vacuum enclosure 6' similarly provided with a Brewster's window 4' at the outside end and an annular anode 3 at the inside end are placed oppositely to each other and the laser tube is connected between these enclosures through the enclosure trays 9 and 9' respectively. In this constitution, the laser tube is composed of the laminate of plural cylindrical insulators 12 and metallic plates 14 each of which is provided with small hole 11 in accordance with the optical axis 8 and plural small holes for gas return 14a-14d and 15a-15d which surround said hole 11. Thus the gas return capillary which is usually arranged in the outside can be saved thereby offering the capillary resistible to a large amount of discharge current at low cost. |
