| 摘要 |
PURPOSE:To stop the leak of a solution in the solution accommodating part of a boat for rotating liquid phase epitaxial growth from the solution accommodating part by a method wherein the boat is so constructed as to be enabled to check separation of a substrate supporter and a solution accommodator according to the projecting part of a rotary shaft body and nuts. CONSTITUTION:Recessed type substrate establishing parts 21 are provided to a substrate supporter 20, and a solution accommodator 23 to form a solution accommodating part 22 according to contact is provided on the supporter 20. Semiconductor substrates 24 are set up in the establishing parts 21. A rotary shaft body 25 is provided inside of the supporter 20 and the accommodator 23. A projecting part 26 to check upward transference of the accommodator 23 is formed at a part of the shaft body 25 thereof, and a flight 27 is formed at another part, for example. Nuts 28 to check downward transference of the supporter 20 are provided to the flight 27 formed part thereof, for example. According to this construction, separation of the supporter 20 and the accommodator 23 to be generated when the accommodator 23 is rotated is checked according to the projecting part 26 and the nuts 28. Accordingly, the leak of a solution in the accommodating part 22 from the accommodating part 22 thereof is stopped. |
