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发明名称
PARTICLE BEAM BLANKING SYSTEM
摘要
申请公布号
EP0048864(B1)
申请公布日期
1985.01.16
申请号
EP19810107153
申请日期
1981.09.10
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
PLIES, ERICH, DR.RER.NAT., DIPL.-PHYS.
分类号
H01J37/04;H01J37/12;H01J37/30;H01J37/305;H01L21/027;(IPC1-7):H01J37/04;H01J37/00
主分类号
H01J37/04
代理机构
代理人
主权项
地址
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