| 摘要 |
PURPOSE:To make it possible to perform automatic measurement highly accurately, by providing a histogram of the output level of an image signal having the width of a minute line. CONSTITUTION:The image of body to be checked 3 having a width W of a line in minute size is expanded and received by image sensors 5 and 6. Photoelectric conversion is performed and the difference in output level is used to form a histogram through an A/D converter, a microprocessor, and the like. Then the maximum value T of the output level is obtained. A specified measuring slice level is automatically set from the maximum value T. The width of the line at the measuring slice level is measured through the bit number of the image sensors, and the result is converted into the minute size and displayed. As a result, the width of the minute line can be effectively and automatically measured highly accurately. |
