| 摘要 |
PURPOSE:To maintain the stable strength of incidence regardless of the thickness of a protection film by a method wherein a film of a reflectance smaller than that of the interface, with respect to the wavelength of a ray emitted from a light source, is interposed at the interface between an object covered with a transparent film over the surface and the transparent film. CONSTITUTION:The transparent protection film 2 is provided by sandwiching the film 7 to make a semiconductor 1 to reduce the interface reflectance, where the film 2 contacts air 3. An interface 8 exists between the surface of the substrate 1 and the film 7, and an interface 9 between the film 7 and the protection film 2. Further, an interface 5 exists between the film 2 and the air. The incidence light 6 comes in through the interface 5 to the direction of an arrow. |
