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发明名称
SEMICONDUCTOR DEVICE AND METHOD OF FORMING ITS ELEMENT ISOLATING FILM
摘要
申请公布号
JPH07130725(A)
申请公布日期
1995.05.19
申请号
JP19930293998
申请日期
1993.10.29
申请人
SONY CORP
发明人
MAARI KOUICHI
分类号
H01L21/316;H01L21/76;H01L21/8247;H01L29/788;H01L29/792;(IPC1-7):H01L21/316;H01L21/824
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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