发明名称 METHOD FOR REMOVING RESIN BURR IN RESIN MOLD SEMICONDUCTOR DEVICE
摘要 PURPOSE:To remove the resin burrs of leads of a frame or between the leads easily in a short time by irradiation with laser beam. CONSTITUTION:Irradiation with laser beam removes the resin burrs of leads of a frame or between the leads. For example, a transporting member which is intermittently actuated transports a resin-mold semiconductor device 3 to place it right under a mask 14. Subsequently, a laser oscillator is actuated to project the laser beam 17 which goes through a deflecting member 12, a condensing lens 13 and slits 16, 16 of the mask 14 to irradiate the resin burrs 5... on the leads 4 or between the leads 4 of the semiconductor device 3 and to remove them by sublimation.
申请公布号 JPS604225(A) 申请公布日期 1985.01.10
申请号 JP19830113037 申请日期 1983.06.23
申请人 TOSHIBA KK 发明人 DAI KATSUAKI
分类号 H01L21/56;H01L21/48;(IPC1-7):H01L21/56 主分类号 H01L21/56
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